
Optical infrared spectroscopy is a well-established method for gas analysis, valued for its speed, stability, and cost efficiency.
In this presentation, we introduce a MEMS-based Fabry–Pérot tunable optical filter, which forms the core of our highly versatile gas analyzer. The compact device (<1 cm²) operates across the 1–15 µm spectral range without moving parts, enabling robust, low-maintenance systems with long operational lifetimes. Its wide tunability allows detection of over 500 gases, with up to eight measured simultaneously.
We will highlight key performance characteristics and demonstrate applications in emission monitoring, fuel metering, and emerging areas such as gas monitoring in food storage, battery quality assessment, and wastewater treatment.
